E12800 - SEMI E128 - XML メッセージ構造に関する仕様 Revision:SEMI E128-0706E - Superseded SEMI E29-93 (Reapproved 0710)

Name: E12800 - SEMI E128 - XML メッセージ構造に関する仕様 Revision:SEMI E128-0706E - Superseded SEMI E29-93 (Reapproved 0710)
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Description

SEMI E29-93 (Reapproved 0710)

SEMI C64-0308 (first published)

orgで入手可能となる。初版は1978年発行。前版は2005年11月発行。

SEMI C3 — Specifications for Gases

Purity and performance grades are described for each of the three types of distribution systems

E12800 - SEMI E128 - XML メッセージ構造に関する仕様 Revision:SEMI E128-0706E - Superseded SEMI E29-93 (Reapproved 0710)global Information & Control Committee20091216global Audits and Reviews Subcommittee20102www. semi. org2003720067 XMLSEMIXMLXMLXMLXMLXML XML2 XMLXMLSEMI XML W3C Simple Object Access ProtocolSOAP SEMISOAP SOAP SOAP 2 XMLXMLXML Referenced SEMI Standards SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E134 Specification for Data Collection Management

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