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arithmetic mean deviation of the assessed profile and Rq
FPD用ガラス基板の耐薬品性テストのための3つの方法を定義する。 A：重量変化法
previously published June 2009
This edition was approved for publication by the global Audits and Reviews Subcommittee on October 19
NOTICE: This Document was balloted and approved for withdrawal in 2008
C00352 - SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality StdPbc-0124 arithmetic mean deviation of theThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in March 2012; originally published in 1995; previously published June 2000. NOTICE: This Document was balloted and approved for withdrawal in 2011; replaced by SEMI C70. To define the specification and analytical