C00607 - SEMI C6.7 - 高圧ガスシリンダ中のグレード10/0.2窒素に対するパーティクル仕様 Revision:SEMI C6.7-93 (Reapproved 1111) - Replaced 5 The more suitable measurement

5  The more suitable measurement process consists of an alternative mounting for wafers with high aspect ratios and the use of high resolution measurements

this Standard will present the general measurement method

This Document covers a monodispersed GNP challenge test method for 20 to 50 nm rated liquid filter

The method of membrane treatment prior to the test for decreasing the adsorbing effect

SEMI C69-1224 (technical revision)

C00607 - SEMI C6.7 - 高圧ガスシリンダ中のグレード10/0.2窒素に対するパーティクル仕様 Revision:SEMI C6.7-93 (Reapproved 1111) - Replaced 5 The more suitable measurementNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org1993200211 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by