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This Document covers a monodispersed GNP challenge test method for 20 to 50 nm rated liquid filter
it is necessary to consider two main situations:
The specification defined by this Standard is applicable to the case for containing substrate materials used in FPD mask manufacturing process
and Korean
本書はパイプラインを通して授受される水素ガスにのみ適用される。シリンダ充填ガスまたは液体状のガスには適用されない。
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0920 This Document covers a monodispersedThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011; originally published in 1997; previously published September 2006. NOTICE: This Document was balloted and approved for withdrawal in 2011. Silane is a pyrophoric, flammable colorless gas.